Yttrium Aluminum Oxide Sputtering Targets (Y3Al5O12) Video
views, Updated: 2021-09-03
Details as follows:
Brand: AEM Deposition
Purity: 99.9%
Size: Φ 2" dia x 0.125" thick
Tolerance: ± 0.1" on all the dimensions
Applications:
• Ferroelectric
• Gate Dielectric
• For CMOS
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