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  • Yttrium Aluminum Oxide Sputtering Targets (Y3Al5O12) Video

    views, Updated: 2021-09-03
    Yttrium Aluminum Oxide Sputtering Targets (Y3Al5O12) https://www.aemdeposition.com/oxide-targets/yttrium-aluminum-oxide-sputtering-targets.html

    Yttrium Aluminum Oxide Sputtering Targets (Y3Al5O12)
    Details as follows:
    Brand: AEM Deposition
    Purity: 99.9%
    Size: Φ 2" dia x 0.125" thick
    Tolerance: ± 0.1" on all the dimensions
     
    Applications:
    • Ferroelectric
    • Gate Dielectric
    • For CMOS
     
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