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    Lithium Phosphate Sputtering Target Video

    views, Updated: 2021-09-09

    Li3PO4 Sputtering Target https://www.aemdeposition.com/oxide-targets/lithium-phosphate-sputtering-targets.html
    Details are as follows:
    Li3PO4 Sputtering Target
    Brand: AEM Deposition
    Purity: 4N 99.99%
    Size: Φ50.8mm x 3.2/3 mm
     
    Applications
    - Reactively deposited in partial pressure
      of nitrogen to produce LIPON
    - Electrolyte layer in rechargeable thin-film batteries
    - Electrochromic glass 
    - Lithium battery anode
     
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