Sputtering Targets
Besides promoting widespread use of its turn-key or “ready-to-go” thin-film solar cell manufacturing equipment, AEM Deposition also provides sputtering targets made from materials ideal for passivation, buffer, and electrode layers in amorphous silicon solar cells and compound semiconductor (CIGS) solar cells. AEM Deposition responds to the needs for transparent, electrically conductive films widely used in solar cells and FPD and touch panels. For example, it provides GZO and AZO thin-films using zinc that is a plentiful resource compared to ITO by utilizing an all-inclusive integrated system ranging from R&D to production engineering and global supply.
Materials(Purity) | Main Applications |
AZO (3N-) | Transparent conductive films |
GZO (3N-) | Transparent conductive films |
Ag (4N) | Reflective film electrode materials |
Ti (3N-) | Electrode material protection films |
Al alloy (5N) | Wiring materials |
ITO (4N) | Transparent conductive films |
Cu (4N) | Precursors |
In (4N) | Precursors |
CuGa (-35wt%Ga) | Precursors |
Si (5N-) | Passivation films |
SiO2 (4N) | Passivation films |
Mo (3N) | Electrode materials |
ZnO (3N) | Transparent conductive films |
At AEM Deposition, resource recovery, recycling, and reuse of valuable rare metals are implemented proactively to pursue efficient use of sputtering targets.