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Lanthanum Hexaboride Sputtering Targets (LaB6)

Material Type	Lanthanum Boride
Symbol	LaB₆
Melting Point (°C)	2,210

Theoretical Density (g/cc)	4.72
Z Ratio	**1.00
Sputter	RF
Max Power Density* (Watts/Square Inch)	20
Type of Bond	Indium, Elastomer

Lanthanum Hexaboride Sputtering Targets

Lanthanum hexaboride (LaB6, also called lanthanum boride and LaB) is an inorganic chemical, a boride of lanthanum. It is a refractory ceramic material with a melting point of 2210 °C and is insoluble in water and hydrochloric acid. It has a low work function and one of the highest electron emissivities known and is stable in the vacuum. Lanthanum Hexaboride is highly insoluble in water and converts to oxide when heated (calcined).

Lanthanum Hexaboride Sputtering Targets Information

Lanthanum Hexaboride Sputtering Targets
Purity: 99.5%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Bonding is recommended for these materials. Many materials have characteristics that are not amenable to sputtering, such as brittleness and low thermal conductivity. This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.

More Information on Lanthanum Hexaboride Sputtering Targets

Applications

• Semiconductor

• Optical

Features

• High purity
• Custom sizes available

Manufacturing Process

• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options

• 99.5% minimum purity

• Smaller sizes also available for R&D applications

• Sputtering target bonding service

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