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Ceramic Oxide Sputtering Targets

Ceramic Oxide Sputtering Targets

Oxide ceramic sputtering targets are one of the most common among advanced ceramic sputtering targets. Oxide ceramics can be made by sintering at high temperatures, with one or more oxides as major components and other minor oxides as additives. These are divided into simple oxide ceramics and complex oxide ceramics.

 

AEM Deposition is a leading ceramic sputtering targets manufacturer from China. We supply high-quality Al2O3, SiO2, Nb2Ox, TiOx, ITO, AZO, YSZ, IGZO, and other sputtering targets worldwide.  Most oxide ceramics have a high melting point, excellent insulation, heat strength, resistance to oxidants, and corrosion. Therefore, they can be exposed to a hyperthermal and oxidative environment for a long time and have many engineering applications. 

One imperfection is vulnerability to plastic deformation at high temperatures, making them unsuitable for use as high-temperature structural materials. Our sputtering targets have such advantages: uniform color, smooth surface, no cracks, no chipping, no external inclusions, and contaminants.

 

Sintering technology is used to produce ceramic sputtering targets. The shape can be round and rectangular. For round targets, the diameter can be 1" to 14", while the thickness can be 3mm to 6.35mm; a particular size can be customized. For rectangular targets, monolithic or several tiles construction is supplied depending on the size. As ceramic sputtering targets are fragile with low thermal conductivity, it will usually be bonded with copper backing plate by indium or elastomer. Hence, the targets' service time will be longer. AEM Deposition provides in-house sputtering target bonding services. You can click the link: Target Bonding to know more details.
 

AEM Deposition enjoys a solid reputation for its exceptional performance. We offer each sputtering target ships with a certificate of analysis and Safety Data Sheet (SDS). 

 

 You can click the "Details" to get more information. We offer particular customize targets to the clients. We offer customized target products made of high-purity raw material powder with super fine grain size. These products have the recognized consistent microstructure to achieve a longer life for targets and desired characteristics of the sputtering deposited thin film.

For your custom R&D, production materials need or if you do not find the sputtering target as per your need from the list. Contact us via email at [email protected] or call us at +86-731-89578196. 

 

For Frequently Asked Questions (FAQ) about Sputtering Targets, please visit this link: Sputtering Targets FAQ.

Oxide Sputtering Targets Material List

Product Name Symbol Purity Target Types Details
Aluminum Oxide Sputtering Targets Al2O3 99.99% Planar Detail
Antimony Oxide Sputtering Targets Sb2O3 99.99% Planar Detail
AZO Sputtering Targets Al2O3/ZnO 2/98 wt% 99.99% Planar Detail
Barium Carbonate Sputtering Targets BaCO3 99.90% Planar Detail
Barium Cerium Yttrium Zirconate Sputtering Targets BaCe(1-x-y)Y(x)Zr(y)O3 99.90% Planar Detail
Barium Ferrite Sputtering Targets BaFe12O19 99.90% Planar Detail
Barium Oxide Sputtering Targets BaO 99.90% Planar Detail
Barium Strontium Titanate Sputtering Targets Ba(1-x)Sr(x)TiO3 99.90% Planar Detail
Barium Strontium Titanate Sputtering Targets Ba0.5Sr0.5TiO3 99.90% Planar Detail
Barium Titanate Sputtering Targets BaTiO3 99.90% Planar Detail
Barium Zirconate Sputtering Targets BaZrO3 99.90% Planar Detail
Bismuth Calcium Ferrite Sputtering Targets Bi0.9Ca0.1FeO3 99.90% Planar Detail
Bismuth Dysprosium Iron Gallate Sputtering Targets Bi2DyFe4GaO12 99.90% Planar Detail
Bismuth Ferrite (Garnet) Sputtering Targets Bi3Fe5O12 99.90% Planar Detail
Bismuth Ferrite Sputtering Targets BiFeO3 99.90% Planar Detail
Bismuth Lanthanum Ferrite Sputtering Targets Bi(1-x) LaxFeO3 99.90% Planar Detail
Bismuth Lutetium Iron Gallate Sputtering Targets Bi1.5Lu1.5Fe4GaO12 99.90% Planar Detail
Bismuth Manganate Sputtering Targets Bi2.4MnO3 99.90% Planar Detail
Bismuth Oxide Sputtering Targets Bi2O3 99.99% Planar Detail
Bismuth Titanate Sputtering Targets Bi4Ti3O3 99.99% Planar Detail
Boron Oxide Sputtering Targets B2O3 99.90% Planar Detail
Cadmium Oxide Sputtering Targets CdO 99.9% - 99.99% Planar Detail
Cadmium Stannate Sputtering Targets Cd2SnO4 99.9% - 99.99% Planar Detail
Calcium Oxide Sputtering Targets CaO 99.95% Planar Detail
Calcium Phosphate Sputtering Targets Ca3(PO4)2 99.90% Planar Detail
Calcium Phosphate Tribasic Sputtering Targets Ca10 (OH)2 (PO4)6 99.90% Planar Detail
Calcium Titanate Sputtering Targets CaTiO3 99.99% Planar Detail
Cerium Bismuth Ferrite Sputtering Targets Ce2.2Bi0.8Fe5O12 99.99% Planar Detail
Cerium Oxide Sputtering Targets CeO2 99.90% Planar Detail
Cerium Yttrium Ferrite Sputtering Targets Ce2.5Y0.5Fe5O12 99.90% Planar Detail
Chromium Oxide Sputtering Targets Cr2O3 99.90% Planar Detail
Chromium Oxide Sputtering Targets CrO3 99.90% Planar Detail
Chromium Silicate Sputtering Targets CrSiO2 99.90% Planar Detail
Cobalt Ferrite Sputtering Targets CoFe2O4 99.90% Planar Detail
Cobalt Oxide Sputtering Targets Co3O4 99.90% Planar Detail
Cobalt Oxide Sputtering Targets CoO 99.90% Planar Detail
Copper Aluminum Oxide Sputtering Targets CuAlO2 99.90% Planar Detail
Copper Oxide Sputtering Targets Cu2O 99.90% Planar Detail
Copper Oxide Sputtering Targets CuO 99.90% Planar Detail
Dysprosium Oxide Sputtering Targets Dy2O3 99.90% Planar Detail
Erbium Oxide Sputtering Targets Er2O3 99.90% Planar Detail
Europium Nickel Oxide Sputtering Targets EuNiO3 99.90% Planar Detail
Europium Oxide Sputtering Targets Eu2O3 99.50% Planar Detail
Europium Titanate Sputtering Targets EuTiO3 99.90% Planar Detail
Gadolinium Cerium Oxide Sputtering Targets Gd0.2Ce0.8O2 99.90% Planar Detail
Gadolinium Oxide Sputtering Targets Gd2O3 99.90% Planar Detail
Gallium Oxide Sputtering Targets Ga2O3 99.9% - 99.99% Planar Detail
Germanium Oxide Sputtering Targets GeO2 99.9% - 99.99% Planar Detail
Hafnium Oxide Sputtering Targets HfO2 99.99% Planar Detail
Holmium Oxide Sputtering Targets Ho2O3 99.9% - 99.95% Planar Detail
Indium Aluminum Zinc Oxide Sputtering Targets In2O3/Al2O3/ZnO 65/16/19 wt% 99.99% Planar Detail
Indium Gallium Zinc Oxide (IGZO) Sputtering Targets InGaZnO4 99.99% Planar Detail
Indium Iron Oxide Sputtering Targets InFe2O4 99.90% Planar Detail
Indium Molybdenum Oxide Sputtering Targets In2O3/Mo 98/2 wt% 99.99% Planar Detail
Indium Oxide Sputtering Targets In2O3 99.99% Planar Detail
Indium Tin Oxide (ITO) Sputtering Targets ITO, In2O3/SnO2, 90/10 wt% 99.99% Planar Detail
Indium Zinc Oxide (IZO) Sputtering Targets IZO, In2O3/ZnO, 90/10 wt% 99.99% Planar Detail
Iridium Oxide Sputtering Targets IrO2 99.90% Planar Detail
Iron Oxide Sputtering Targets Fe2O3 99.5- 99.9% Planar Detail
Iron Oxide Sputtering Targets Fe3O4 99.9% - 99.99% Planar Detail
Lanthanum Aluminate Sputtering Targets LaAlO3 99.90% Planar Detail
Lanthanum Calcium Manganate Sputtering Targets La0.5Ca0.5MnO3 99.90% Planar Detail
Lanthanum Calcium Manganate Sputtering Targets La0.7Ca0.3MnO3 99.90% Planar Detail
Lanthanum Calcium Manganate Sputtering Targets La1-xCaxMnO3 99.90% Planar Detail
Lanthanum Copper Manganate Sputtering Targets La2CuMnO6 99.90% Planar Detail
Lanthanum Copper Oxide Sputtering Targets La2CuO4 99.90% Planar Detail
Lanthanum Ferrite Sputtering Targets LaFeO3 99.90% Planar Detail
Lanthanum Gallate Sputtering Targets LaGaO3 99.90% Planar Detail
Lanthanum Lithium Titanate Sputtering Targets La(1-x) LixTiO3 99.90% Planar Detail
Lanthanum Manganate Sputtering Targets LaMnO3 99.90% Planar Detail
Lanthanum Nickel Oxide Sputtering Targets LaNiO3 99.90% Planar Detail
Lanthanum Oxide Sputtering Targets La2O3 99.99% Planar Detail
Lanthanum Praseodymium Calcium Manganate Sputtering Targets La(1-x-y)PrxCayMnO3 99.90% Planar Detail
Lanthanum Scandium Oxide Sputtering Targets LaScO3 99.90% Planar Detail
Lanthanum Strontium Chromate Sputtering Targets La(1-x)SrxCrO3 99.90% Planar Detail
Lanthanum Strontium Cobalt Oxide Sputtering Targets La0.5Sr0.5CoO3 99.90% Planar Detail
Lanthanum Strontium Cobalt Iron Oxide Sputtering Targets (LSCF)  LaxSr1-xCoyFe1-yO3 99.90% Planar Detail
Lanthanum Strontium Copper Oxide Sputtering Targets La(1-x)SrxCuO4 99.90% Planar Detail
Lanthanum Strontium Manganate Sputtering Targets La0.67Sr0.33MnO3 99.90% Planar Detail
Lanthanum Strontium Manganate Sputtering Targets La0.7Sr0.3MnO3 99.90% Planar Detail
Lanthanum Strontium Manganate Sputtering Targets La0.9Sr0.1MnO3 99.90% Planar Detail
Lanthanum Strontium Manganate Sputtering Targets La1-xSrxMnO3 99.90% Planar Detail
Lanthanum Titanate Sputtering Targets LaTiO3 99.90% Planar Detail
Lanthanum Vanadium Oxide Sputtering Targets LaVO3 99.90% Planar Detail
Lead Calcium Titanate Sputtering Targets Pb0.7Ca0.3TiO3 99.90% Planar Detail
Lead Lanthanum Zirconium Titanate Sputtering Targets (PLZT) Pb1-xLax(ZryTi1-y)1-0.25xO3 99.90% Planar Detail
Lead Oxide Sputtering Targets PbO 99.90% Planar Detail
Lead Titanate Sputtering Targets PbTiO3 99.90% Planar Detail
Lead Zirconate Titanate with Niobium Sputtering Targets PbZr0.52Ti0.48O3 with 1 at% Nb 99.90% Planar Detail
Lead Zirconate Sputtering Targets PbZrO3 99.90% Planar Detail
Lead Zirconium Titanate Sputtering Targets PZT, PbZr0.52Ti0.48O3 99.90% Planar Detail
Lithium Cobalt Oxide Sputtering Targets LiCoO2 99.99% Planar Detail
Lithium Nickel Vanadium Oxide Sputtering Targets LiNiVO4 99.90% Planar Detail
Lithium Iron PhosphateSputtering Targets LiFePO4 99.90% Planar Detail
Lithium Manganate Sputtering Targets LiMn2O4 99.90% Planar Detail
Lithium Nickel Cobalt Oxide Sputtering Targets LiNi(1-x)CoxO2 99.90% Planar Detail
Lithium Nickel Manganese Cobalt Oxide Sputtering Targets LiNi0.33Mn0.33Co0.33O2 99.9% Planar Detail
Lithium Nickel Phosphate Sputtering Targets LiNiPO4 99.99% Planar Detail
Lithium Niobate Sputtering Targets LiNbO3 99.99% Planar Detail
Lithium Phosphate Sputtering Targets Li3PO4 99.99% Planar Detail
Lithium Silicate Sputtering Targets Li4SiO4 99.99% Planar Detail
Lithium Tantalate Sputtering Targets LiTaO3 99.90% Planar Detail
Lithium Titanate Sputtering Targets Li4Ti5O12 99.90% Planar Detail
Lithium Zirconate Sputtering Targets Li6Zr2O7 99.90% Planar Detail
Lutetium Oxide Sputtering Targets Lu2O3 99.9% - 99.99% Planar Detail
Magnesium aluminate Sputtering Targets MgAl2O4 99.90% Planar Detail
Magnesium Oxide Sputtering Targets MgO 99.95% Planar Detail
Magnesium Zinc Oxide Sputtering Targets Mg(1-x) ZnxO 99.95% Planar Detail
Manganese Cobalt Oxide Sputtering Targets MnCo2O4 99.90% Planar Detail
Manganese Oxide Sputtering Targets MnO 99.90% Planar Detail
Molybdenum Oxide Sputtering Targets MoO3 99.90% Planar Detail
Neodymium Aluminate Sputtering Targets NdAlO3 99.90% Planar Detail
Neodymium Copper Oxide Sputtering Targets Nd2CuO4 99.90% Planar Detail
Neodymium Gadolinium Oxide Sputtering Targets NdGdO3 99.90% Planar Detail
Neodymium Nickel Oxide Sputtering Targets NdNiO3 99.90% Planar Detail
Neodymium Oxide Sputtering Targets Nd2O3 99.90% Planar Detail
Neodymium Strontium Manganate Sputtering Targets Nd(1-x)SrxMnO3 99.90% Planar Detail
Nickel Ferrite Sputtering Targets NiFe2O4 99.90% Planar Detail
Nickel Oxide Sputtering Targets NiO 99.90% Planar Detail
Niobium Oxide Sputtering Targets Nb2O5 99.95% Planar Detail
Niobium Oxide Sputtering Targets Nb2Ox 99.95% Planar Detail
Potassium Niobate Sputtering Targets KNbO3 99.95% Planar Detail
Praseodymium Calcium Manganate Sputtering Targets Pr0.7Ca0.3MnO3 99.90% Planar Detail
Praseodymium Cerium Manganate Sputtering Targets Pr(1-x)CexMnO3 99.90% Planar Detail
Praseodymium Nickel Oxide Sputtering Targets PrNiO 99.90% Planar Detail
Praseodymium Oxide Sputtering Targets Pr2O3 99.90% Planar Detail
Ruthenium Oxide Sputtering Targets RuO2 99.90% Planar Detail
Samarium Cerium Copper Oxide Sputtering Targets Sm(1-x)CexCuO4 99.90% Planar Detail
Samarium Copper Oxide Sputtering Targets SmCuO4 and Sm2CuOx 99.90% Planar Detail
Samarium Oxide Sputtering Targets Sm2O3 99.9% - 99.99% Planar Detail
Scandium Oxide Sputtering Targets Sc2O3 99.9% - 99.99% Planar Detail
Selenium Oxide Sputtering Targets SeO2 99.90% Planar Detail
Silicon Dioxide Sputtering Targets SiO2 100.00% Planar Detail
Silicon Monoxide Sputtering Targets SiO 99.90% Planar Detail
Sodium Niobate Sputtering Targets NaNbO3 99.99% Planar Detail
Strontium Aluminate doped with Europium Sputtering Targets SrAl2O4 with 3 wt% Eu 99.90% Planar Detail
Strontium Bismuth Niobate Sputtering Targets SBN (SrBi2Nb2O9) 99.90% Planar Detail
Strontium Bismuth Tantalate Sputtering Targets SBT (Sr0.8Bi2.2Ta2O9) 99.90% Planar Detail
Strontium Copper Oxide Sputtering Targets SrCuO2 99.90% Planar Detail
Strontium Lead Oxide Sputtering Targets Sr3PbO 99.90% Planar Detail
Strontium Manganate Sputtering Targets SrMnO3 99.90% Planar Detail
Strontium Niobium Titanate Sputtering Targets SrNb(1-x)TixO3 99.90% Planar Detail
Strontium Oxide Sputtering Targets SrO 99.50% Planar Detail
Strontium Ruthanate Sputtering Targets SrRuO3 99.90% Planar Detail
Strontium Titanate Sputtering Targets SrTiO3 99.90% Planar Detail
Strontium Zirconate Sputtering Targets SrZrO3 99.90% Planar Detail
Tantalum Oxide Sputtering Targets Ta2O5 99.95% Planar Detail
Tantalum Oxide Sputtering Targets Ta2Ox 99.95% Planar Detail
Tellurium Oxide Sputtering Targets TeO2 99.9% - 99.99% Planar Detail
Terbium Ferrite Sputtering Targets Tb3Fe5O12) 99.90% Planar Detail
Terbium Manganate Sputtering Targets TbMnO3 99.90% Planar Detail
Terbium Oxide Sputtering Targets Tb4O7 99.9% - 99.95% Planar Detail
Tin Oxide Sputtering Targets SnO2 99.99% Planar Detail
Titanium Dioxide Sputtering Targets TiO2 99.99% Planar Detail
Titanium Ferrite Sputtering Targets TiFe2O4 99.90% Planar Detail
Titanium Monoxide Sputtering Targets TiO 99.90% Planar Detail
Tungsten Oxide Sputtering Targets WO3 99.90% Planar Detail
Vanadium Dioxide Sputtering Targets VO2 99.90% Planar Detail
Vanadium Oxide Sputtering Targets V2O5 99.90% Planar Detail
Ytterbium Oxide Sputtering Targets Yb2O3 99.90% Planar Detail
Yttrium Aluminum Oxide Sputtering Targets Y3Al5O12 99.90% Planar Detail
Yttrium Ferrite Sputtering Targets Y3Fe5O12 99.90% Planar Detail
Yttrium Manganate Sputtering Targets YMnO3 99.90% Planar Detail
Yttrium Oxide Sputtering Targets Y2O3 99.90% Planar Detail
Zinc Oxide Alumina  (AZO) Sputtering Targets ZnO/Al2O3 (2% Standard Doping) 99.99% Planar Detail
Zinc Oxide doped with Gallium Oxide (GZO) Sputtering Targets GZO, ZnO/Ga2O3 95/05 wt% 99.99% Planar Detail
Zinc Oxide doped with Magnesium Sputtering Targets Zn0.9Mg0.1O 99.90% Planar Detail
Zinc Oxide doped with Manganese Sputtering Targets ZnO with 0.3 wt% Mn 99.90% Planar Detail
Zinc Oxide doped with Manganese Sputtering Targets ZnO with 4 wt% Mn 99.90% Planar Detail
Zinc Oxide doped with Scandia Sputtering Targets ZnO/Sc2O3 98/02 wt% 99.90% Planar Detail
Zinc Oxide doped with Sodium Sputtering Targets Zn0.99Na0.01O 99.90% Planar Detail
Zinc Oxide Sputtering Targets ZnO 99.9, 99.99% Planar Detail
Zirconia stabilized with Yttria Sputtering Targets Zr(1-x)YxO2 99.90% Planar Detail
Zirconium Oxide Sputtering Targets ZrO2 99.90% Planar Detail
Zirconia Fully Stabilized with Yttria Sputtering Targets (YSZ) ZrO2 (fully stabilized - Y2O3) 99.90% Planar Detail


AZO Sputtering Targets (Al2O3/ZnO 2/98 wt%)

AZO Sputtering Targets (Al2O3/ZnO 2/98 wt%)

ITO Sputtering Targets (Indium Tin Oxide)

ITO Sputtering Targets (Indium Tin Oxide)

Indium Zinc Oxide Sputtering Targets (IZO)

Indium Zinc Oxide Sputtering Targets (IZO)

GZO Sputtering Targets (ZnO/Ga2O3 95/05 wt%)

GZO Sputtering Targets (ZnO/Ga2O3 95/05 wt%)

Yttria-stabilized Zirconia Sputtering Target (YSZ)

Yttria-stabilized Zirconia Sputtering Target (YSZ)