Yttrium Manganate Sputtering Targets (YMnO3)
Material Type | Yttrium Manganate |
Symbol | YMnO3 |
Color/Appearance | Grey, Solid |
Melting Point (°C) | N/A |
Theoretical Density (g/cc) | N/A |
Water Solubility | Insoluble |
Sputter | RF, RF-R, DC |
Type of Bond | Indium, Elastomer |
Comments |
Yttrium Manganate Sputtering Targets
YMnO3 is a hexagonal crystal characterized by high carbon oxidation activity.
Yttrium Manganate Sputtering Targets Information
Yttrium Manganate Sputtering Targets
Purity: 99.99%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
More Information on Yttrium Manganate Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.99% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Evaporation Materials |
Crucibles N/A |
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