Yttrium Oxide Sputtering Targets (Y2O3)
| Material Type | Yttrium Oxide |
| Symbol | Y2O3 |
| Color/Appearance | White, Crystalline Solid |
| Melting Point (°C) | 2,410 |
| Theoretical Density (g/cc) | 5.01 |
| Z Ratio | **1.00 |
| Sputter | RF, RF-R |
|
Max Power Density* (Watts/Square Inch) |
20 |
| Type of Bond | Indium, Elastomer |
| Comments | Loses oxygen; films smooth and clear. |
Yttrium Oxide Sputtering Targets
Yttrium oxide, also known as yttria, is Y2O3. It is an air-stable, white solid substance. Yttrium oxide is used as a common starting material for both materials science as well as inorganic compounds. The thermal conductivity of yttrium oxide is 27 W/(m*k)
Yttrium Oxide Sputtering Targets Information
Yttrium Oxide Sputtering Target
Purity is 99.9%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Bonding is recommended for these materials. Many materials have characteristics that are not amenable to sputtering, such as brittleness and low thermal conductivity. This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.
More Information on Yttrium Oxide Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Yttrium Oxide Sputtering Targets
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N/A
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Ceramic Sputtering Targets |
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Evaporation Materials |
Crucibles N/A |
Metal Powders Yttrium Oxide Powder |
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