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Lanthanum Strontium Manganate Sputtering Targets (La1-xSrxMnO3)

Material Type	Lanthanum Strontium Manganate
Symbol	La_(1-x)Sr_xMnO₃, LSMO
Color/Appearance	Various colors, Solid
Melting Point (°C)	N/A

Relative Density (g/cc)	6.5
Z Ratio	N/A
Sputter	RF, RF-R, DC
Max Power Density* (Watts/Square Inch)	N/A
Type of Bond	Indium, Elastomer
Comments

More Information on Lanthanum Strontium Manganate Sputtering Targets

Applications

• Ferroelectric
• Gate Dielectric

• For CMOS

Features

• High purity
• Custom sizes available

Manufacturing Process

• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options

• 99.9% minimum purity

• Smaller sizes also available for R&D applications

• Sputtering target bonding service

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