Cerium Oxide Sputtering Targets (CeO2)
Material Type | Cerium (IV) Oxide |
Symbol | CeO2 |
Color/Appearance | White or Pale Yellow, Crystalline Solid |
Melting Point (°C) | ~2,600 |
Z Ratio | **1.00 |
Sputter | RF, RF-R |
Max Power Density* (Watts/Square Inch) |
20 |
Type of Bond | Indium, Elastomer |
Comments | Very little decomposition. |
Cerium Oxide Sputtering Targets
Cerium(IV) oxide, also known as ceric oxide, ceric dioxide, ceria, cerium oxide or cerium dioxide, is an oxide of the rare earth metal Cerium. It is a pale yellow-white powder with the chemical formula CeO2. It is an important commercial product and an intermediate in the purification of the element from the ores. The distinctive property of this material is its reversible conversion to a nonstoichiometric oxide.
Cerium Oxide Sputtering Targets Information
Cerium Oxide Sputtering Targets
Purity: 99.9%;
Circular: Diameter <= 14 inch, Thickness >= 1 mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
More Information on Cerium Oxide Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS
• Non-volatile memory
• Thin film capacitor
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Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Cerium Oxide Sputtering Targets
N/A
|
Ceramic Sputtering Targets |
|
Evaporation Materials Cerium Oxide Pellet |
Crucibles N/A |
Metal Powders N/A |
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