Tungsten Oxide Sputtering Targets (WO3)
| Material Type | Tungsten Oxide |
| Symbol | WO3 |
| Color/Appearance | Lemon Yellow, Solid |
| Melting Point (°C) | 1,473 |
| Theoretical Density (g/cc) | 7.16 |
| Z Ratio | **1.00 |
| Sputter | RF-R |
| Type of Bond | Indium, Elastomer |
| Comments | Preheat gently to outgas. W reduces oxide slightly. |
Tungsten Oxide Sputtering Targets
Tungsten(VI) oxide, also known as tungsten trioxide or tungstic anhydride, WO3, is a chemical compound containing oxygen and the transition metal tungsten. It is obtained as an intermediate in the recovery of tungsten from its minerals. Tungsten ores are treated with alkalis to produce WO3. Further reaction with carbon or hydrogen gas reduces tungsten trioxide to pure metal.
Tungsten Oxide Sputtering Targets Information
Tungsten Trioxide Sputtering Targets
Purity: 99.99%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
More Information on Tungsten Oxide Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options• 99.99% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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