Yttria-stabilized Zirconia Sputtering Target (YSZ)
| Material Type | Yttria fully stabilized zirconia |
| Symbol | ZrO2 / Y2O3 92/8 mol% or wt%, YSZ |
| Color/Appearance | White/Off-white, Solid |
| Melting Point (°C) | ~2,700 |
| Relative Density (g/cc) | 5.89 |
| Water Solubility | Insoluble |
| Sputter | RF, RF-R, DC |
| Type of Bond | Indium, Elastomer |
| Comments | Films oxygen deficient, clear and hard. |
Yttria-stabilized Zirconia Sputtering Targets
Yttria-stabilized Zirconia Sputtering Targets Information
Zirconia Fully Stabilized with Yttria Sputtering Targets (YSZ) Sputtering Targets
Purity: 99.9%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Partially Stabilized ZrO2 available upon request. Bonding is recommended for these materials. Many materials have characteristics that are not amenable to sputtering, such as brittleness and low thermal conductivity. This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.
More Information on Yttria-stabilized Zirconia Sputtering Targets
Applications• Fuel cells• Oxygen sensors |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Yttria-stabilized Zirconia Sputtering Targets
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N/A
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Ceramic Sputtering Targets Zirconium Boride Sputtering Target |
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Evaporation Materials Zirconium Evaporation Pellet |
Crucibles Zirconia Mortars & Pestles |
Metal Powders Zirconium Powder |
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