Lithium Phosphate Sputtering Targets (Li3PO4)
| Material Type | Lithium Phosphate |
| Symbol | Li3PO4 |
| Color/Appearance | White / Off-white, Solid |
| Melting Point (°C) | >340 |
| Theoretical Density (g/cc) | 2.39 |
| Water Solubility | Insoluble |
| Sputter | RF, RF-R, DC |
|
Max Power Density* (Watts/Square Inch) |
N/A |
| Type of Bond | Indium, Elastomer |
| Comments |
Lithium Phosphate Sputtering Targets
Lithium Phosphate Sputtering Targets
Purity: 99.99%;
Circular: Diameter <= 14 inch, Thickness <= 15 mm;
Block: Length <= 120 +/-0.1 mm, Width <= 120 +/-0.1 mm,Thickness <= 15 mm
More Information on Lithium Phosphate Sputtering Targets
Applications• Reactively deposited in partial pressure of nitrogen to produce LIPON (lithium phosphorous oxynitride)
• Electrolyte layer in rechargeable thin film batteries
• Electrochromic glass • Lithium battery anode |
Features• High purity
• High density
• Stoichiometric
• Phase pure
• Homogenous
|
Manufacturing Process• In-house powder synthesis, High purity precursor materials, Wet chemistry process utilized for powder synthesis, High energy mixing, Specially formulated calcination schedule, Particle sizing processes
• Multiple step densification, Proprietary processes employed for pressing and sintering
• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment
|
Options
• 99.99% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
|
XRD Chart of Lithium Phosphate Sputtering Targets
Related Products of Lithium Phosphate Sputtering Targets
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Ceramic Sputtering Targets Lithium Cobalt Oxide Sputtering Target |
|
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Evaporation Materials Lithium Evaporation Pellet |
Crucibles N/A |
Metal Powders N/A |
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