Vanadium Dioxide Sputtering Targets (VO2)
Material Type | Vanadium Dioxide |
Symbol | VO2 |
Color/Appearance | Dark blue solid |
Melting Point (°C) | 1967 |
Theoretical Density (g/cc) | 4.57 |
Z Ratio | **1.00 |
Sputter | RF |
Type of Bond | Indium, Elastomer |
Vanadium Dioxide Sputtering Targets
VO2 sputter target is usually in dark green or blue color. VO2 has a quite low phase transition temperature. Due to the properties could change up several orders, it is widely used in sensors, imaging and other electronic components. Also, this property leads to the difficulty to obtain pure vanadium dioxide, without the interference of other vandium oxides, such as V3O4. In most of cases, the finished VO2 target is actually mixture of VO2 and V3O4 but usually affect little on the property of thinfilm produced by sputtering.
Vanadium Dioxide Sputtering Targets Information
Vanadium Dioxide Sputtering Targets
Purity: 99.9%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
More Information on Vanadium Dioxide Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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XRD Chart of Vanadium Dioxide Sputtering Targets
Related Products of Vanadium Dioxide Sputtering Targets
Ceramic Sputtering Targets |
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Evaporation Materials Vanadium Pellet |
Metal |
Metal Powders |
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