Zinc Oxide Sputtering Targets (ZnO)
Material Type | Zinc Oxide |
Symbol | ZnO |
Color/Appearance | White, Crystalline Solid |
Melting Point (°C) | 1,975 |
Theoretical Density (g/cc) | 5.61 |
Z Ratio | 0.556 |
Sputter | RF-R |
Max Power Density* (Watts/Square Inch) |
20 |
Type of Bond | Indium, Elastomer |
Zinc Oxide Sputtering Targets
Zinc Oxide Sputtering Targets Information
Zinc Oxide Sputtering Targets
Purity is 99.9% - 99.99%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Bonding is recommended for these materials. Many materials have characteristics that are not amenable to sputtering, such as brittleness and low thermal conductivity. This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.
More Information on Zinc Oxide Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Zinc Oxide Sputtering Targets
Ceramic Sputtering Targets |
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Evaporation Materials |
Crucibles N/A |
Metal Powders Zinc Powder |