Scandium Oxide Sputtering Targets (Sc2O3)


Material Type | Scandium Oxide |
Symbol | Sc2O3 |
Color/Appearance | White |
Melting Point (°C) | 2485 |
Density | 3860 kg/m-3 |
Molecular Weight | 137.9 |
Sputter | |
Exact Mass | 137.897 g/mol |
Scandium Oxide Sputtering Targets
Scandium Oxide, Sc2O3, or Scandia is a high melting temperature rare earth oxide. It is used in the preparation of other scandium compounds and high-temperature systems (for its resistance to heat and thermal shock), electronic ceramics, and glass composition (as a helper material).
Scandium Oxide Sputtering Targets Information
Scandium Oxide Sputtering Targets
Purity: 99.99%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
More Information on Scandium Oxide Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.99% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Scandium Oxide Sputtering Targets
Ceramic Sputtering Targets Scandium Oxide Sputtering Target |
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Evaporation Materials |
Crucibles N/A |
Metal Powders N/A |



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