Sputtering Targets
|
Material | Formular | Purity | Sputtering Target | Evaporation Materials | |
---|---|---|---|---|---|
Pure Metal | Scandium | Sc | 2N-3N5 | detail | detail |
Alloy | Aluminum Scandium | Al/Sc | 3N | detail | |
Alloy | Tungsten Scandium | W/Sc | 3N | ||
Compounds | Lanthanum Scandium Oxide | LaScO3 | 3N | detail | |
Compounds | Scandium Oxide | Sc2O3 | 3N-4N | detail | detail |
Compounds | Scandium Fluride | ScF3 | 3N-4N | ||
Compounds | Scandium Sulfate | Sc2(SO4)3.xH2O | 3N-4N |