Sputtering Targets
|
Material | Formular | Purity | Sputtering Target | Evaporation Materials | |
---|---|---|---|---|---|
Pure Metal | Silicon (N-type) | Si | 99.999% | detail | detail |
Pure Metal | Silicon (P-type) | Si | 99.999% | detail | detail |
Pure Metal | Silicon (undoped) | Si | 99.999% | detail | detail |
Alloy | Aluminum Silicon Copper | Al/Si/Cu | 99.9% | detail | |
Alloy | Chrome/Silicon Monoxide | Cr/SiO 70/30 WT% | 99.9% | detail | |
Compounds | Silicon Carbide | SiC | 99.5% | detail | |
Compounds | Silicon Dioxide | SiO2 | 99.995% | detail | detail |
Compounds | Silicon Monoxide | SiO | 99.9% | detail | detail |
Compounds | Silicon Nitride | Si3N4 | 99.9% | detail |