Sputtering Targets
|
Material | Formular | Purity | Sputtering Target | Evaporation Materials | |
---|---|---|---|---|---|
Pure Metal | Tantalum | Ta | 99.95% | detail | detail |
Compounds | Tantalum Carbide | TaC | 99.5% | detail | |
Compounds | Tantalum Nitride | TaN | 99.5% | detail | |
Compounds | Tantalum Oxide | Ta2O5 | 99.9% | detail | detail |
Compounds | Tantalum Oxide | Ta2Ox | 99.9% | detail | |
Compounds | Tantalum Silicide | TaSi2 | 99.5% | detail |