Cerium Fluoride Sputtering Targets (CeF3)
| Material Type | Cerium Fluoride |
| Symbol | CeF3 |
| Color/Appearance | White, Crystalline Solid |
| Melting Point (°C) | 1,460 |
| Theoretical Density (g/cc) | 7.13 |
| Z Ratio | **1.00 |
| Sputter | RF |
|
Max Power Density* (Watts/Square Inch) |
20 |
| Type of Bond | Indium, Elastomer |
| Comments | Preheat gently to outgas. n~1.7 |
Cerium Fluoride Sputtering Targets
Cerium(III) fluoride (or cerium trifluoride), CeF3, is an ionic compound of the rare earth metal cerium and fluorine. It appears as a mineral in the form of fluocerite-(Ce-).
Cerium Fluoride Sputtering Targets Information
Cerium Fluoride Sputtering Targets
Purity: 99.9%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Indium bonding is recommended for this material due to its characteristics not amenable to sputtering like brittleness and low thermal conductivity. This material has a low thermal conductivity and susceptible to thermal shock.
More Information on Cerium Fluoride Sputtering Targets
Applications• Chemical Vapor Deposition (CVD)• Physical Vapor Deposition (PVD) • Semiconductor • Optical |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Cerium Fluoride Sputtering Targets
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N/A
|
Ceramic Sputtering Targets |
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|
Evaporation Materials Cerium Oxide Pellet |
Crucibles N/A |
Metal Powders N/A |
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