Titanium Oxide (TiOx) Rotary Sputtering Target
Introduction
Changsha Advanced Engineering Materials (AEM) produces Titanium Oxide (TiOx) Rotary Sputtering Targets with low oxygen content, which are widely used in photovoltaic glass, optical glass, touch screen glass, construction and Automotive Glass Industry. The dimensions can be produced according to customer's requirements.
Specifications
| Materials | Titanium Oxide Rotary Sputtering Target |
| Symbol | TiOx (1.7<x<1.9) |
| Purity | 99.5%-99.95% |
| Melting Point (°C) | N/A |
| Production Method |
Spraying Type
Bonded Type (Cold isostatic pressing + high temperature sintering)
|
| Backing Tube | Titanium, Stainless Steel |
| Bonding Materia | Indium or Elastomer |
| Size | As per customer's drawings |
| Relative Density | >=97% (>=4.13 g/cm³) |
| Resistivity (Ω.cm) | <=0.3 |
| Annual Capacity | 1000 tons |
Applications
- Thin Film Photovoltaic Solar Industry
- Semiconductor Electronics Industry
- Flat Panel Display Industry
- Construction / Automotive Glass Industry
- Optical Coating
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