Zirconium (Zr) Rotary Sputtering Target


Introduction
Zirconium (Zr) Rotary Sputtering Targets have excellent characteristics of high hardness, ductility and corrosion resistance. They are mainly used in electronics industry, Low-e glass coating, touch screen coating.
Changsha Advanced Engineering Materials (AEM) produces 99.5%-99.95% purity of Zirconium (Zr) rotary sputtering targets with customized sizes.
Specifications
Materials | Zirconium Rotary Sputtering Target |
Symbol | Zr |
Purity | 99.5%-99.95% |
Theoretical Density (g/cc) | 6.49 |
Melting Point (°C) | 1,852 |
Production Method |
Spraying Type
Monolithic Type (HIP)
|
Backing Tube | Titanium, Stainless Steel |
Size | As per customer's drawings |
Relative Density | >=99% |
Grain Sizes | <100 um |
Annual Capacity | 1000 tons |
Applications
- Flat Panel Display Industry
- Construction / Automotive Glass Industry
- Decorative / Functional Coating Industry



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