Zirconium Boride Sputtering Targets (ZrB2)
Material Type | Zirconium Boride |
Symbol | ZrB2 |
Color/Appearance | Dark Grey, Solid |
Melting Point (°C) | 3,000 |
Theoretical Density (g/cc) | 6.085 |
Water Solubility | Insoluble |
Sputter | RF, RF-R, DC |
Type of Bond | Indium, Elastomer |
Comments |
Zirconium Boride Sputtering Targets
Zirconium diboride (ZrB2) is a highly covalent refractory ceramic material with a hexagonal crystal structure. ZrB2 is an ultra-high-temperature ceramic (UHTC) with a melting point of 3246°C. Its relatively low density of ~6.09 g/cm3 (measured density may be higher due to hafnium impurities) and good high-temperature strength makes it a candidate for high-temperature aerospace applications such as hypersonic flight or rocket propulsion systems. It is an unusual ceramic having relatively high thermal and electrical conductivity properties, that it shares with isostructural titanium diboride and hafnium diboride.
Zirconium Boride Sputtering Targets Information
Zirconium Boride Sputtering Targets
Purity is 99.5%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
More Information on Zirconium Boride Sputtering Targets
Applications• Chemical Vapor Deposition (CVD)• Physical Vapor Deposition (PVD) • Semiconductor • Optical |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.5% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Zirconium Boride Sputtering Targets
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Crucibles Zirconia Mortars & Pestles |
Metal Powders Zirconium Powder |
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