Niobium Oxide Sputtering Targets (Nb2Ox)
Material Type | Niobium Oxide |
Symbol | Nb2Ox |
Color/Appearance | Black, Crystalline Solid, Grey-Black |
Melting Point (°C) | 1,520 |
Theoretical Density (g/cc) | 4.6 |
Z Ratio | **1.00 |
Sputter | RF, RF-R |
Type of Bond | Indium, Elastomer |
General
Material Notes
Niobium Oxide Sputtering Targets, Purity is 99.95%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.
Other Information of Niobium Oxide Sputtering Targets
Applications • Ferroelectric • Gate Dielectric • For CMOS |
Features • High purity • Custom Sizes Available |
Manufacturing Process • Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options • 99.9% ex Strontium Minimum Purity • Up to 12'' Diameter Targets Available • Planar Tiles Up to 8'' X 5'' for Larger Target Configurations |
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